The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 2011
Filed:
Apr. 02, 2008
Nobuyuki Nagayama, Yamanashi, JP;
Kouji Mitsuhashi, Yamanashi, JP;
Hiroyuki Nakayama, Yamanashi, JP;
Nobuyuki Nagayama, Yamanashi, JP;
Kouji Mitsuhashi, Yamanashi, JP;
Hiroyuki Nakayama, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
An in-chamber member to use in the chamber of a plasma processing vessel has a coating film formed by a coating agent. The in-chamber member having deposits formed on the coating film is separated from the chamber and is immersed into a peeling solvent, e.g., acetone. Since the coating agent is made of a resist formed of a main component of, e.g., cyclized rubber-bisazide and a photosensitive component, the deposits can be separated from the in-chamber member together with the coating film being separated.