The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 2011
Filed:
Mar. 29, 2006
Applicants:
Kenji Suzuki, Guilderland, NY (US);
Atsushi Gomi, Rennselaer, NY (US);
Inventors:
Kenji Suzuki, Guilderland, NY (US);
Atsushi Gomi, Rennselaer, NY (US);
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/06 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
Abstract
A system for introducing a precursor vapor to a processing chamber configured for forming a thin metal on a substrate is described. The vapor delivery system includes means for introducing a dilution gas to the precursor vapor and adjusting the spatial distribution of the dilution gas addition in order to affect improvements to the properties of the deposited film.