The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 2011
Filed:
May. 22, 2007
Applicants:
Takeshi Hirao, Koshi, JP;
Akihiro Fujimoto, Koshi, JP;
Yasutaka Souma, Koshi, JP;
Inventors:
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 3/04 (2006.01);
U.S. Cl.
CPC ...
Abstract
Disclosed are a nozzle cleaning apparatus and a nozzle cleaning method, which are capable of effectively cleaning a nozzle for discharging a process liquid to a substrate, with a simple structure and a low cost. A nozzleis accommodated in a cleaning containerhaving a funnel-shaped portion. A solvent T as a cleaning liquid is supplied along an inner surface of the funnel-shaped portion. The solvent T forms a vortex flow whirling around the nozzle. By exposing the nozzleto the vortex flow, the nozzlecan be effectively, thoroughly cleaned.