The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2011
Filed:
Oct. 15, 2008
Ananda V. Mysore, Sunnyvale, CA (US);
Steve G. Gonzalez, Santa Cruz, CA (US);
Reid E. Berry, Ii, Ben Lomond, CA (US);
Hans Leuthold, Santa Cruz, CA (US);
Ananda V. Mysore, Sunnyvale, CA (US);
Steve G. Gonzalez, Santa Cruz, CA (US);
Reid E. Berry, II, Ben Lomond, CA (US);
Hans Leuthold, Santa Cruz, CA (US);
Seagate Technology LLC, Scotts Valley, CA (US);
Abstract
A metrology system for measuring a cone angle, a cone straightness, and a cone quality of a sample and method of using the metrology system are disclosed. The system includes a rotary stage, one or more workpiece fixtures that hold the samples in the rotary stage, and a number of different sized measurement devices. The measuring devices are positioned next to the rotary stage and measure the samples using contact. The rotary stage is free to rotate when the measuring devices are in a non-measuring state. The invention also includes a processor that collects data from the measurement devices and calculates the cone angle, the cone straightness, and the cone quality of each sample based on the data.