The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2011
Filed:
Mar. 27, 2008
Frans H. Van Deuren, Valkenswaard, NL;
Hendrick Dirk Visser, Waalre, NL;
Bernard Stommen, Geldrop, NL;
Jeroen Van Aert, Eindhoven, NL;
Aart Johannes Mateboer, Al Waalre, NL;
Frans H. van Deuren, Valkenswaard, NL;
Hendrick Dirk Visser, Waalre, NL;
Bernard Stommen, Geldrop, NL;
Jeroen van Aert, Eindhoven, NL;
Aart Johannes Mateboer, Al Waalre, NL;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
In one embodiment, an actuator for positioning of mirrors in an optical system is provided and includes an actuator base and a reaction mass assembly. The reaction mass assembly includes a reaction mass support member having biasing features formed as a part thereof and a reaction mass that is coupled to the biasing features such that the reaction mass is suspended on biasing elements in six degrees of freedom (DOF). The support member is fixedly connected to the actuator base; however, the reaction mass is not directly attached to the actuator base but rather is supported in the reaction mass support member in a manner that allows it to have six DOF.