The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2011
Filed:
Jan. 09, 2009
Javier A. Ayala, Poughkeepsie, NY (US);
Marc J. Postiglione, New Milford, CT (US);
Eric P. Solecky, Hyde Park, NY (US);
Javier A. Ayala, Poughkeepsie, NY (US);
Marc J. Postiglione, New Milford, CT (US);
Eric P. Solecky, Hyde Park, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A system and method for optimizing and implementing a metrology sampling plan. A system is provided that includes a system for collecting historical metrology data from a metrology tool; and a reduction analysis system that compares an initial capability calculated from the historical metrology data with a recalculated capability for a reduced data set, wherein the reduced data set is obtained by removing a subset of data from the historical metrology data.