The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2011
Filed:
Feb. 01, 2008
Albert Jan Hendrik Klomp, Eindhoven, NL;
Jan Frederik Hoogkamp, Breda, NL;
Josephus Cornelius Johannes Antonius Vugts, Waalwijk, NL;
Robert Gordon Livesey, Haywards Heath, GB;
Johannes Hendrikus Gertrudis Franssen, Eersel, NL;
Albert Jan Hendrik Klomp, Eindhoven, NL;
Jan Frederik Hoogkamp, Breda, NL;
Josephus Cornelius Johannes Antonius Vugts, Waalwijk, NL;
Robert Gordon Livesey, Haywards Heath, GB;
Johannes Hendrikus Gertrudis Franssen, Eersel, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A load lock is constructed and arranged to transfer a substrate between a first environment and a second environment and to maintain each of the first environment and the second environment therein. The load lock includes a load lock chamber provided with at least two mutually distinct substrate supports positioned one above the other. Each of the substrate supports includes a substrate displacement element. The load lock also includes an evacuation device constructed and arranged to evacuate the load lock chamber, and a door constructed and arranged to close the load lock chamber during evacuation and for opening the load lock chamber.