The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2011
Filed:
Sep. 29, 2009
Huang-sheng Cheng, Kaohsiung, TW;
Cheng-jung Tsai, Kaohsiung, TW;
Huang-Sheng Cheng, Kaohsiung, TW;
Cheng-Jung Tsai, Kaohsiung, TW;
Win Way Technology Co., Ltd., Kaohsiung, TW;
Abstract
A compliant chuck has a top base assembly, a bottom bracket assembly, a contact plate, a sensor device, a thermoelectric cooling module and a heat-dissipating module. The bottom bracket assembly has a center opening. The contact plate is disposed between the top base assembly and the bottom bracket assembly and has a protrusion corresponding to the center opening and having a mounting hole and an adsorbing hole. The sensor device is mounted in the mounting hole. The thermoelectric cooling module is attached to a top surface of the contact plate. The heat-dissipating module is mounted on the thermoelectric cooling module and cooperates with a chiller to dissipate heat. The compliant chuck uses the sensor device to sense surface temperature of a semiconducting device during testing the semiconducting device so as to compensate the temperature by controlling current into the thermoelectric cooling module.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile