The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 25, 2011

Filed:

Sep. 25, 2003
Applicants:

Hiroshi Sawada, Kusatsu, JP;

Kou Kurosawa, Miyazaki, JP;

Inventors:

Hiroshi Sawada, Kusatsu, JP;

Kou Kurosawa, Miyazaki, JP;

Assignee:

Canon Machinery Inc., Shiga-Ken, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 6/34 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A periodic structure is to be successively formed over an extensive area with a uniaxial laser beam. Such method includes irradiating a uniaxial laser beam near an ablation threshold to a surface of a material; and executing an overlapped scanning on the irradiated region, so as to cause an ablation by interference between an incident beam and a surface scattered wave along the material surface; increasing the scattered wave; causing an interference at an interval equal to a wavelength of the laser beam, to thereby cause spontaneous formation of a periodic structure. The periodic structure can be made to have a different ripple spacing by changing an incident angle of the laser beam to the material surface. When the laser incident beam has an angle, the ripple spacing can be changed by changing a scanning direction.


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