The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2011
Filed:
Feb. 07, 2008
Masanori Gunji, Hitachinaka, JP;
Katsunori Nakajima, Hitachi, JP;
Yasuhiko Nara, Hitachinaka, JP;
Tsutomu Saito, Hitachinaka, JP;
Shigeru Izawa, Mito, JP;
Masanori Gunji, Hitachinaka, JP;
Katsunori Nakajima, Hitachi, JP;
Yasuhiko Nara, Hitachinaka, JP;
Tsutomu Saito, Hitachinaka, JP;
Shigeru Izawa, Mito, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A probe storage container can supply a probe in a prober apparatus without being exposed to an atmospheric air. Preferably, the probe is stored in the probe storage container by removing an oxide film in a leading end portion of the probe in accordance with a dry treatment using an ion source, for example, without being exposed to the atmospheric air. It is thus possible to replace and attach the probe with respect to the prober apparatus without being exposed to the atmospheric air, avoiding formation of an oxide film on a surface of the probe. Further, a worker attaching the probe to the prober apparatus can work without being directly in contact with the probe, and it is possible to prevent the leading end portion of the probe from being broken. Accordingly, it is possible to stably measure an electric characteristic of a semiconductor device or the like on the wafer.