The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2011
Filed:
Sep. 19, 2008
Kevin S. Cook, Hammonds Plains, CA;
Dennis Manning, Commerce, OK (US);
Edward K. Mcintyre, Franklin, MA (US);
Richard Goldberg, Boston, MA (US);
Kevin S. Cook, Hammonds Plains, CA;
Dennis Manning, Commerce, OK (US);
Edward K. McIntyre, Franklin, MA (US);
Richard Goldberg, Boston, MA (US);
SemEquip, Inc., North Billerica, MA (US);
Abstract
The invention features in-situ cleaning process for an ion source and associated extraction electrodes and similar components of the ion-beam producing system, which chemically removes carbon deposits, increasing service lifetime and performance, without the need to disassemble the system. In particular, an aspect of the invention is directed to an activating, catalytic, or reaction promoting species added to the reactive species to effectively convert the non-volatile molecular residue into a volatile species which can be removed by conventional means.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile