The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2011
Filed:
Feb. 15, 2006
Tsuyoshi Yamasaki, Koshi, JP;
Masataka Sakai, Koshi, JP;
Tsuyoshi Yamasaki, Koshi, JP;
Masataka Sakai, Koshi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A stage apparatus includes a stage over which a substrate is to be transferred, and a levitation mechanism which levitates the substrate over the stage. The stage includes a plurality of gas spray ports () to spray a gas for levitating the substrate (G), and a plurality of suction ports () to take in air sprayed from the gas spray ports (). The plurality of gas spray ports () and the plurality of suction ports () are set not to be arranged on straight lines parallel to a substrate transfer direction in a predetermined length along the substrate transfer direction.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile