The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2011
Filed:
Feb. 20, 2008
Sen-yih Chou, Taipei, TW;
Shu-ping Dong, Taichung County, TW;
Wei-te Hsu, Taipei County, TW;
Deh-ming Shyu, Miaoli County, TW;
Chia-lin Wu, Hsinchu, TW;
Yi-sha Ku, Hsinchu, TW;
Chang-hai Sung, Hsinchu County, TW;
Sen-Yih Chou, Taipei, TW;
Shu-Ping Dong, Taichung County, TW;
Wei-Te Hsu, Taipei County, TW;
Deh-Ming Shyu, Miaoli County, TW;
Chia-Lin Wu, Hsinchu, TW;
Yi-Sha Ku, Hsinchu, TW;
Chang-Hai Sung, Hsinchu County, TW;
Industrial Technology Research Institute, Hsin-Chu, TW;
Abstract
A method and an apparatus are disclosed for scatterfield microscopical measurement. The method integrates a scatterometer and a bright-field microscope for enabling the measurement precision to be better than the optical diffraction limit. With the aforesaid method and apparatus, a detection beam is generated by performing a process on a uniform light using an LCoS (liquid crystal on silicon) or a DMD (digital micro-mirror device) which is to directed to image on the back focal plane of an object to be measured, and then scattered beams resulting from the detection beam on the object's surface are focused on a plane to form an optical signal which is to be detected by an array-type detection device. The detection beam can be oriented by the modulation device to illuminate on the object at a number of different angles, by which zero order or higher order diffraction intensities at different positions of the plane at different incident angles can be collected.