The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2011
Filed:
Jun. 18, 2008
Naoyuki Taketomi, Tsukuba, JP;
Sinichirou Yanaka, Tsukuba, JP;
Naoyuki Taketomi, Tsukuba, JP;
Sinichirou Yanaka, Tsukuba, JP;
Mitutoyo Corporation, Kawasaki-shi, Kanagawa, JP;
Abstract
A tracking type laser interferometer that detects displacement of a retroreflectorbeing an object to be measured by utilizing interference of a laser beamirradiated onto the retroreflectorand reflected by the retroreflectorin the returning direction, and carries out tracking by means of a two-axis turning mechanismusing displacement in the position of the optical axis of the laser beam; the same tracking type laser interferometer, includes; a light irradiatorthat emits a fan-shaped laser lightthat is fan-shaped including the optical axis of the laser beam, is interlocked with turning movements of the two-axis turning mechanismaround an axis orthogonal to the center axis of the corresponding fan shape; and a light receptorthat has a specific positional relationship with the retroreflectoror the light irradiatorand receives the fan-shaped laser light. Thereby, tracking can be automatically reset when the tracking is disabled due to a reason such as interruption of laser light or initial adjustment work can be automated when commencing measurement.