The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2011
Filed:
Dec. 12, 2002
John Gritters, Livermore, CA (US);
Christopher A. Bang, Glendale, CA (US);
Erno Klaassen, Los Altos, CA (US);
LI Fan, San Ramon, CA (US);
Richard Chen, Woodland Hills, CA (US);
Hsin-chih Yeh, College Park, MD (US);
Ezekiel John Joseph Kruglick, San Diego, CA (US);
John Gritters, Livermore, CA (US);
Christopher A. Bang, Glendale, CA (US);
Erno Klaassen, Los Altos, CA (US);
Li Fan, San Ramon, CA (US);
Richard Chen, Woodland Hills, CA (US);
Hsin-Chih Yeh, College Park, MD (US);
Ezekiel John Joseph Kruglick, San Diego, CA (US);
Other;
Abstract
In certain embodiments, a MEMS actuator is provided comprising a frame and a movable structure coupled to the frame. A vertical comb drive is provided between the frame and the movable structure to actuate the movable structure.