The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2011
Filed:
Oct. 11, 2007
Geoffrey Ryding, Manchester, MA (US);
Gregory Robert Alcott, Hampshire, GB;
Lee Spraggon, East Sussex, GB;
Robert Mitchell, West Sussex, GB;
Martin Hilkene, Gilroy, CA (US);
Matthew Castle, Morgan Hill, CA (US);
Marvin Farley, Ipswich, MA (US);
Geoffrey Ryding, Manchester, MA (US);
Gregory Robert Alcott, Hampshire, GB;
Lee Spraggon, East Sussex, GB;
Robert Mitchell, West Sussex, GB;
Martin Hilkene, Gilroy, CA (US);
Matthew Castle, Morgan Hill, CA (US);
Marvin Farley, Ipswich, MA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A guide tube for an ion beam in an ion implanter which is located adjacent a semiconductor wafer being implanted has an outwardly tapering central bore, thereby alleviating problems of beam strike as the ion beam passes through the guide tube.