The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2011
Filed:
Jul. 31, 2008
Hiroyuki Ito, Hitachinaka, JP;
Yuko Sasaki, Mito, JP;
Yoshiya Higuchi, Tokai, JP;
Takeshi Kawasaki, Musashino, JP;
Hiroyuki Ito, Hitachinaka, JP;
Yuko Sasaki, Mito, JP;
Yoshiya Higuchi, Tokai, JP;
Takeshi Kawasaki, Musashino, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
In a charged-particle beam apparatus having a high-accuracy and high-resolution focusing optical system for charged-particle beam, a group of coils are arranged along a beam emission axis to extend through the contour of radial planes each radiating from the beam emission axis representing a rotary axis and each having a circular arc which subtends a divisional angle resulting from division of a circumferential plane by a natural number larger than 2 so that a superposed magnetic field may be generated on the incident axis of the charged-particle beam and the trajectory of the charged-particle beam may be controlled by the superposed magnetic field.