The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2011
Filed:
Dec. 22, 2009
Applicants:
Youfan Gu, Superior, CO (US);
Paul Dozoretz, Hudson, CO (US);
Inventors:
Youfan Gu, Superior, CO (US);
Paul Dozoretz, Hudson, CO (US);
Assignee:
MKS Instruments, Inc., Boulder, CO (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B01D 53/38 (2006.01); B01D 53/68 (2006.01); B01D 53/76 (2006.01);
U.S. Cl.
CPC ...
Abstract
A small scale, but effective, reactive chemical containment system includes apparatus and methods for reaction of process gases exhausted from reaction furnaces with a reactant gas in a non-combustible manner to produce and contain particulate or powder byproducts, thereby removing the process gas from the exhaust gas flow. The apparatus provides process gas inlet, treatment reactive gas diffusion, process gas and treatment reactive gas pre-mixing, primary containment, secondary containment, and outlet zones.