The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2011
Filed:
Jul. 15, 2008
Applicants:
Martin Antoni, Aalen, DE;
Frank Melzer, Utzmemmingen, DE;
Andreas Seifert, Aalen, DE;
Wolfgang Singer, Aalen, DE;
Inventors:
Martin Antoni, Aalen, DE;
Frank Melzer, Utzmemmingen, DE;
Andreas Seifert, Aalen, DE;
Wolfgang Singer, Aalen, DE;
Assignee:
Carl Zeiss SMT AG, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 5/08 (2006.01);
U.S. Cl.
CPC ...
Abstract
A focusing-device for the radiation from a light source () is provided with a collector mirror (') which is arranged in a mount () and collects the light, in virtual or real terms, from the light source () at the second focus (). The collector mirror (′) is displaceably connected to the mount () via a bearing in such a way that its optical properties remain at least approximately the same even in the event of temperature changes.