The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 11, 2011
Filed:
Jan. 31, 2007
Zeev Litichever, Rehovot, IL;
Erez Sali, Savion, IL;
Oren Cohen, Holon, IL;
Applied Materials South East Asia Pte. Ltd., Singapore, SG;
Abstract
Inspection of objects such as semiconductor wafers may proceed on a cell-to-cell or die-to-die basis. An image of a wafer may be obtained and the cells or dies shown therein can be inspected using any combination of appropriate die-to-die or cell-to-cell inspection methods. For example, one or more areas may be designated for cell-to-cell inspection. For each cell type, a reference image can be generated by obtaining an image of the area and displacing the image by an amount equal to the repetition vector for that cell type in opposite directions. The displaced images and the original image can be combined into a single reference image. The original image can then be compared to the reference image. In some embodiments, the displaced images are also compared to the reference image to statistically determine the presence or absence of defects.