The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 11, 2011
Filed:
Oct. 21, 2008
Didier Belot, Rives, FR;
Andreia Cathelin, Laval, FR;
Alexandre Augusto Shirakawa, Bordeaux, FR;
Jean-marie Pham, Merignac, FR;
Pierre Jary, Talence, FR;
Eric Kerherve, Talence, FR;
Didier Belot, Rives, FR;
Andreia Cathelin, Laval, FR;
Alexandre Augusto Shirakawa, Bordeaux, FR;
Jean-Marie Pham, Merignac, FR;
Pierre Jary, Talence, FR;
Eric Kerherve, Talence, FR;
STMicroelectronics S.A., Montrouge, FR;
Centre National de la Recherche Scientifique, Paris Cedex, FR;
Abstract
A Lamb wave resonator includes a piezoelectric layer, and a first electrode against a first face of the piezoelectric layer. The first electrode includes fingers and a contact arm, with each finger including a first side in contact with the contact arm and two other sides parallel to one another. Portions of the piezoelectric layer are at least partially etched between the two fingers to form a recess. The fingers are spaced apart from one another by a distance W calculated according to the following equation: