The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 11, 2011
Filed:
Oct. 05, 2009
Jeffrey P. Gambino, Westford, VT (US);
Jason P. Gill, Essex Junction, VT (US);
Sean Smith, Hopewell Junction, NY (US);
Jean E. Wynne, Fair Haven, VT (US);
Jeffrey P. Gambino, Westford, VT (US);
Jason P. Gill, Essex Junction, VT (US);
Sean Smith, Hopewell Junction, NY (US);
Jean E. Wynne, Fair Haven, VT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
An interconnect structure which includes a metal-containing cap located atop each conductive feature that is present within a dielectric material is provided in which a surface region of the metal-containing cap is oxidized prior to the subsequent deposition of any other dielectric material thereon. Moreover, metal particles that are located on the surface of the dielectric material between the conductive features are also oxidized at the same time as the surface region of the metal-containing cap. This provides a structure having a reduced leakage current. In accordance with the present invention, the oxidation step is performed after electroless plating of the metal-containing cap and prior to the deposition of a dielectric capping layer or an overlying interlayer or intralevel dielectric material.