The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 11, 2011
Filed:
Jul. 02, 2007
Applicants:
Hye-young Park, Seongnam-si, KR;
Sung-lae Cho, Yongin-si, KR;
Byoung-jae Bae, Hwaseong-si, KR;
Jin-il Lee, Seongnam-si, KR;
Ji-eun Lim, Yongin-si, KR;
Young-lim Park, Anyang-si, KR;
Inventors:
Hye-young Park, Seongnam-si, KR;
Sung-lae Cho, Yongin-si, KR;
Byoung-jae Bae, Hwaseong-si, KR;
Jin-il Lee, Seongnam-si, KR;
Ji-eun Lim, Yongin-si, KR;
Young-lim Park, Anyang-si, KR;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/205 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention provides metal precursors for low temperature deposition. The metal precursors include a metal ring compound including at least one metal as one of a plurality of elements forming a ring. Methods of forming a metal thin layer and manufacturing a phase change memory device including use of the metal precursors is also provided.