The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 11, 2011
Filed:
Jul. 07, 2006
Robert T. Chinnock, Victoria, MN (US);
Clifford Miller, Bloomington, MN (US);
Charles Meacham, Circle Pines, MN (US);
Robert T. Chinnock, Victoria, MN (US);
Clifford Miller, Bloomington, MN (US);
Charles Meacham, Circle Pines, MN (US);
Entegris, Inc., Billerica, MA (US);
Abstract
A flow controller including a unitary controller body with a chemically inert fluid conduit having an insertable constriction or orifice disposed within the conduit having a reduced cross-sectional area to thereby restrict the flow of fluid within the conduit allowing for reliable flow measurement. An integrated circuit or controller may be coupled to the control valve and also coupled to the pressure sensors by a lead structure including signal conductors surrounded by a Faraday cage, and a chemically inert housing coupled to the unitary controller body enclosing the control valve and the pressure sensors.