The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 11, 2011
Filed:
Apr. 11, 2008
Bauke Jansen, Deurne, NL;
Raymond Gerardus Marius Beeren, Dalhem, BE;
Anthonius Martinus Cornelis Petrus DE Jong, Pijnacker, NL;
Kornelis Tijmen Hoekerd, Eindhoven, NL;
Bauke Jansen, Deurne, NL;
Raymond Gerardus Marius Beeren, Dalhem, BE;
Anthonius Martinus Cornelis Petrus De Jong, Pijnacker, NL;
Kornelis Tijmen Hoekerd, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A cleaning tool to clean a surface of a liquid confinement system of an immersion lithographic apparatus is disclosed, the liquid confinement system having an aperture to allow passage of a beam of radiation therethrough of an immersion lithographic apparatus. The cleaning tool includes a sonic transducer, a reservoir configured to hold liquid between the sonic transducer and the surface to be cleaned, and a barrier positioned in the reservoir under the aperture to form, in use, a shield to sonic waves.