The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 28, 2010
Filed:
Jan. 17, 2008
Thomas Bischoff, Aalen, DE;
Hagen Federau, Meersburg, DE;
Willi Heintel, Aalen, DE;
Bernd Wuesthoff, Frankfurt am Main, DE;
Jochen Wieland, Aalen, DE;
Thomas Bischoff, Aalen, DE;
Hagen Federau, Meersburg, DE;
Willi Heintel, Aalen, DE;
Bernd Wuesthoff, Frankfurt am Main, DE;
Jochen Wieland, Aalen, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
An optical element module comprising a plurality of module components is provided. The module components comprise an optical element, an optical element holder and a contact element. The optical element has a first coefficient of thermal expansion. The optical element holder holds the optical element via the first contact element and has a second coefficient of thermal expansion, the second coefficient of thermal expansion being different from the first coefficient of thermal expansion. At least one of the module components is adapted to provide at least a reduction of forces introduced into the optical element upon a thermally induced position change in the relative position between the optical element and the optical element holder, the position change resulting from a temperature situation variation in a temperature situation of the plurality of module components.