The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 28, 2010
Filed:
Jul. 06, 2007
Tsutomu Hiroki, Nirasaki, JP;
Hiroaki Saeki, Nirasaki, JP;
Tsutomu Hiroki, Nirasaki, JP;
Hiroaki Saeki, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A supporting mechanism (A) is used for transfer-ring a target substrate (W) in cooperation with a transfer arm (), in a semiconductor processing system. The supporting mechanism includes first and second holding portions (A toC,A toC) each configured to be moved up and down and transfer a substrate to and from the transfer arm. The first and second holding portions are configured to be moved relative to each other in a vertical direction without spatially interfering with each other, and support substrates at substantially the same horizontal coordinate position. The supporting mechanism further includes first and second drives () configured to move the first and second holding portions up and down, and a controller () configured to control the first and second drives. The controller is arranged to control the first and second drives to alternatively support a substrate by the first and second holding portions.