The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 21, 2010
Filed:
Jun. 22, 2009
Yong Soo Joung, Icheon-si, KR;
Seung Woo Jin, Icheon-si, KR;
An Bae Lee, Seoul, KR;
Young Hwan Joo, Cheongju-si, KR;
Yong Soo Joung, Icheon-si, KR;
Seung Woo Jin, Icheon-si, KR;
An Bae Lee, Seoul, KR;
Young Hwan Joo, Cheongju-si, KR;
Hynix Semiconductor Inc., Icheon-si, KR;
Abstract
A method for fabricating a semiconductor memory device includes: forming a lower conductive layer over a semiconductor substrate; forming an insulation layer over the lower conductive layer; etching the insulation layer to form a contact hole that exposes a portion of the lower conductive layer; forming a contact plug in the contact hole; doping the contact plug by performing a plasma doping process while varying a temperature of regions the semiconductor substrate; and forming an upper conductive layer connected with the lower conductive layer through the contact plug.