The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 21, 2010
Filed:
May. 20, 2009
Yi Feng Lee, Taoyuan County, TW;
Chun Chi Chen, Taipei, TW;
Yun-zong Tian, Taichung County, TW;
Wei Jun Chen, Taichung County, TW;
Yi Feng Lee, Taoyuan County, TW;
Chun Chi Chen, Taipei, TW;
Yun-Zong Tian, Taichung County, TW;
Wei Jun Chen, Taichung County, TW;
Inotera Memories, Inc., Taoyuan County, TW;
Abstract
A method for monitoring fabrication parameters comprises steps of: obtaining a normal parameter variance curve and a comparing parameter variance curve; defining a plurality of normal parameter points on the normal parameter variance curve; defining a plurality of comparing parameter points on the comparing parameter variance curve; finding out the corresponding comparing parameter points nearest to the normal parameter points; calculating the distances between the normal parameter points and the corresponding comparing parameter points thereof; summing up the distances so as to receive a total distance; and determining whether or not the total distance exceeds a limit. Via this arrangement, when fabrication parameter of tool is abnormal, it can be efficiently and immediately determined.