The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 14, 2010
Filed:
Jul. 26, 2005
Alexander F. Hoermann, Menlo Park, CA (US);
Yevgeniy Rabinovich, Fremont, CA (US);
Kathryn P. Ta, Saratoga, CA (US);
Alexander F. Hoermann, Menlo Park, CA (US);
Yevgeniy Rabinovich, Fremont, CA (US);
Kathryn P. Ta, Saratoga, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An electrochemical plating system, which includes one or more plating cell reservoirs for storing plating solution and a chemical analyzer in fluidic communication with the one or more plating cell reservoirs. The chemical analyzer is configured to measure chemical concentrations of the plating solution. The plating system further includes a plumbing system configured to facilitate the fluidic communication between the one or more plating cell reservoirs and the chemical analyzer and to substantially isolate the chemical analyzer from electrical noise generated by one or more plating cells of the one or more plating cell reservoirs.