The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 14, 2010
Filed:
Jul. 19, 2007
Cherngye Hwang, San Jose, CA (US);
Dennis R. Mckean, Milpitas, CA (US);
Gary J. Suzuki, San Jose, CA (US);
Cherngye Hwang, San Jose, CA (US);
Dennis R. McKean, Milpitas, CA (US);
Gary J. Suzuki, San Jose, CA (US);
Hitachi Global Storage Technologies, Netherlands, B.V., Amsterdam, NL;
Abstract
Patterning a surface, comprising at least one feature having silicon coupled to a substrate, is described herein. In one embodiment a method is described for patterning a surface which comprises at least one feature having silicon and at least one feature having carbon coupled to a substrate. The surface is coated with 3-(trimethoxysilyl)propyl methacrylate, and a photoresist is applied the 3-(trimethoxysilyl)propyl methacrylate coated surface. The photoresist is imaged and the surface is etched. The photoresist is then removed.