The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 14, 2010
Filed:
Jul. 10, 2007
Jae-hyun Yang, Gyeonggi-do, KR;
Yo-han Ahn, Gyeonggi-do, KR;
Kun-hyung Lee, Gyeonggi-do, KR;
Gui-young Cho, Gyeonggi-do, KR;
Hong-hee Jeong, Gyeonggi-do, KR;
Mi-ae Kim, Gyeonggi-do, KR;
Jae-Hyun Yang, Gyeonggi-do, KR;
Yo-Han Ahn, Gyeonggi-do, KR;
Kun-Hyung Lee, Gyeonggi-do, KR;
Gui-Young Cho, Gyeonggi-do, KR;
Hong-Hee Jeong, Gyeonggi-do, KR;
Mi-Ae Kim, Gyeonggi-do, KR;
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Abstract
In an embodiment, heat treatment equipment comprises a process tube, an exhaust duct connected to the process tube, and, during operation, exhausting gases present within the process tube. The heat treatment equipment also comprises a hollow pressure control member interposed between the process tube and the exhaust duct, the pressure control member being operatively connected to the process tube and the exhaust duct respectively, and including one or a number of openings. Negative pressure is avoided in the process tube during heat treatment processes so that unwanted gas and impurities cannot enter the process tube from outside.