The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 07, 2010
Filed:
Aug. 23, 2006
Tuvia Dror Kutscher, Shoham, IL;
Zvi Goren, Ness-Tziona, IL;
Efrat Rozenman, Asseret, IL;
Rami Elichai, Asqelon, IL;
Tuvia Dror Kutscher, Shoham, IL;
Zvi Goren, Ness-Tziona, IL;
Efrat Rozenman, Asseret, IL;
Rami Elichai, Asqelon, IL;
Applied Materials Israel, Ltd., Rehovot, IL;
Abstract
A method for inspecting a plurality of dies, that are typically disposed on a surface of a semiconducting wafer. Each of the dies includes respective functional features within the die. The method consists of identifying within a first die a first multiplicity of the functional features having respective characteristics, and measuring respective first locations of the first multiplicity with respect to an origin of the first die. Within a group of second dies a second multiplicity of the functional features having the respective characteristics is identified, respective second locations of the second multiplicity are measured. The second locations are compared to the first locations to determine a location of an origin of the group of the second dies.