The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 07, 2010
Filed:
Aug. 17, 2006
William A. Polinsky, Meridian, ID (US);
Michael B. Ball, Boise, ID (US);
William A. Polinsky, Meridian, ID (US);
Michael B. Ball, Boise, ID (US);
Micron Technology, Inc., Boise, ID (US);
Abstract
Methods for releasably attaching sacrificial support members to microfeature workpieces and microfeature devices formed using such methods are disclosed herein. One embodiment, for example, is directed to a method for processing a microfeature workpiece releasably attached to a first support member. The workpiece includes a microelectronic substrate, a plurality of microelectronic dies on and/or in the substrate, and a sacrificial support member attached to an active side of the substrate. The method can include separating individual dies from the workpiece by cutting through the sacrificial support member and the substrate while the workpiece is attached to the first support member. The method can also include attaching a singulated die and corresponding portion of the sacrificial support member as a unit to a second support member. The method can further include removing the sacrificial support member from the die attached to the second support member with a removal solution that attacks a material of which the sacrificial support member is composed.