The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 07, 2010
Filed:
Apr. 27, 2005
Masaki Tsujimoto, Itabashi-ku, JP;
Takahisa Yoshioka, Itabashi-ku, JP;
Kenji Kobayashi, Itabashi-ku, JP;
Masaki Tsujimoto, Itabashi-ku, JP;
Takahisa Yoshioka, Itabashi-ku, JP;
Kenji Kobayashi, Itabashi-ku, JP;
Lintec Corporation, Tokyo, JP;
Abstract
A peeling apparatusincludes a peeling tablesupporting a wafer W on which a sheet S is stuck and a sheet peeling unitdisposed above the peeling table, in which sheet S can be peeled off with relative movement of the sheet peeling unitand the peeling table. The peeling apparatusincludes a support rollof peeling tape PT, first and second rollsbonding the peeling tape PT to the sheet S surface, and a winding rollof the peeling tape PT. Peeling-off is performed in a state of forming an initial peeling angle asuch that a peeling tape PT is folded in an aperture C formed between the second rolland the sheet S, and afterwards the sheet S is peeled off at subsequent peeling angle acorresponding to a diameter of the second roll