The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 07, 2010
Filed:
Aug. 28, 2008
Jiong-shiun Hsu, Taichung, TW;
Hui-ching LU, Hsinchu, TW;
Chung-lin Wu, Hsinchu, TW;
Sheng-jui Chen, Taoyuan County, TW;
Jiong-Shiun Hsu, Taichung, TW;
Hui-Ching Lu, Hsinchu, TW;
Chung-Lin Wu, Hsinchu, TW;
Sheng-Jui Chen, Taoyuan County, TW;
Industrial Technology Research Institute, Hsinchu, TW;
Abstract
This invention relates to a device and method for optical nanoindentation measurement, according to which respective measurement results are obtained by having an indenter tip apply load to a fixed portion of a thin film, having an indenter tip apply load to a non-fixed portion of a thin film, and having a vibrating component transmit the dynamic properties of the vibration to the thin film. By combining the above measurement results in calculations, the Young's modulus, the Poisson's ratio, and the density of the thin film can be obtained.