The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2010
Filed:
Jun. 17, 2005
Applicants:
Richard Joseph Bruls, Eindhoven, NL;
Orlando Serapio Cicilia, Eindhoven, NL;
Tammo Uitterdijk, De Bilt, NL;
Herman Boom, Eindhoven, NL;
Inventors:
Richard Joseph Bruls, Eindhoven, NL;
Orlando Serapio Cicilia, Eindhoven, NL;
Tammo Uitterdijk, De Bilt, NL;
Herman Boom, Eindhoven, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/62 (2006.01); G03B 27/58 (2006.01);
U.S. Cl.
CPC ...
Abstract
The mechanical properties of a pellicle frame and/or the pellicle are optimized so that the mechanical effect of the frame and pellicle on the mask shape in use is optimum for imaging. In particular the pellicle frame assembly may be arranged to be mechanically neutral, i.e., the mask adopts the same shape with pellicle attached as it would without the pellicle.