The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2010
Filed:
Sep. 21, 2004
Applicant:
Akio Misaka, Osaka, JP;
Inventor:
Akio Misaka, Osaka, JP;
Assignee:
Panasonic Corporation, Osaka, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A patternprovided on a transparent substrateas a mask pattern includes partial patternsA andB. Each of the partial patternsA andB has a mask enhancer structure including a phase shifterfor transmitting exposing light in an opposite phase with respect to a transparent portion and a shielding portionsurrounding the phase shifterThe partial patternA is close to other patternsandat distances not larger than a given distance with the transparent portion sandwiched therebetween. The width of the phase shifterA of the partial patternA is smaller than the width of the phase shifterB of the partial patternB.