The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2010
Filed:
Mar. 21, 2006
Nobuaki Matsuoka, Koshi, JP;
Shinichi Hayashi, Koshi, JP;
Yasushi Hayashida, Koshi, JP;
Yoshitaka Hara, Koshi, JP;
Nobuaki Matsuoka, Koshi, JP;
Shinichi Hayashi, Koshi, JP;
Yasushi Hayashida, Koshi, JP;
Yoshitaka Hara, Koshi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
Disclosed herein is a development apparatus having a plurality of coating units and a development process unit stacked on each other in a layered direction in a process block which is connected at the rear side of the carrier block. A first transportation unit, which ascends and descends in the layered direction, is provided in the carrier block. Also, in the carrier block, the bottom of a substrate inspection unit is located above a highest position to which the first transportation unit is able to ascend in the layered direction.