The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 2010
Filed:
Mar. 03, 2008
Lyudmila Zaykova-feldman, Dallas, TX (US);
Thomas M. Moore, Dallas, TX (US);
Gonzalo Amador, Dallas, TX (US);
Matthew Hammer, Dallas, TX (US);
Lyudmila Zaykova-Feldman, Dallas, TX (US);
Thomas M. Moore, Dallas, TX (US);
Gonzalo Amador, Dallas, TX (US);
Matthew Hammer, Dallas, TX (US);
Omniprobe, Inc., Dallas, TX (US);
Abstract
A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.