The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 2010
Filed:
Jan. 30, 2009
Kenneth H. Smith, Chandler, AZ (US);
Nicholas D. Rizzo, Gilbert, AZ (US);
Sanjeev Aggarwal, Scottsdale, AZ (US);
Anthony Ciancio, Gilbert, AZ (US);
Brian R. Butcher, Queen Creek, AZ (US);
Kelly Wayne Kyler, Mesa, AZ (US);
Kenneth H. Smith, Chandler, AZ (US);
Nicholas D. Rizzo, Gilbert, AZ (US);
Sanjeev Aggarwal, Scottsdale, AZ (US);
Anthony Ciancio, Gilbert, AZ (US);
Brian R. Butcher, Queen Creek, AZ (US);
Kelly Wayne Kyler, Mesa, AZ (US);
Everspin Technologies, Inc., Chandler, AZ (US);
Abstract
A method of forming a magnetoelectronic device includes forming a dielectric material () surrounding a magnetic bit (), etching the dielectric material () to define an opening () over the magnetic bit () without exposing the magnetic bit (), the opening () having a sidewall, depositing a blanket layer () of cladding material over the dielectric material (), including over the sidewall, removing by a sputtering process the blanket layer () in the bottom of the opening () and the dielectric material () over the magnetic bit (), and forming a conductive material () within the opening () to form a bit line (). This process reduces errors caused by process irregularities such as edges of the bits () protruding and thereby causing defects in the cladding layer () formed thereover. A bit line or digit line so formed may optionally be tapered at the ends () to prevent magnetic reversal of the bit line magnetic moment that otherwise may occur due to external magnetic fields.