The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 2010
Filed:
Jun. 26, 2006
Aaron Webb, Austin, TX (US);
Adam Brailove, Gloucester, MA (US);
Joseph Yudovsky, Campbell, CA (US);
Nir Merry, Mountain View, CA (US);
Andrew Constant, Cupertino, CA (US);
Efrain Quiles, San Jose, CA (US);
Michael R. Rice, Pleasanton, CA (US);
Gary J. Rosen, San Carlos, CA (US);
Vinay K. Shah, San Mateo, CA (US);
Aaron Webb, Austin, TX (US);
Adam Brailove, Gloucester, MA (US);
Joseph Yudovsky, Campbell, CA (US);
Nir Merry, Mountain View, CA (US);
Andrew Constant, Cupertino, CA (US);
Efrain Quiles, San Jose, CA (US);
Michael R. Rice, Pleasanton, CA (US);
Gary J. Rosen, San Carlos, CA (US);
Vinay K. Shah, San Mateo, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A batch processing platform used for ALD or CVD processing is configured for high throughput and minimal footprint. In one embodiment, the processing platform comprises an atmospheric transfer region, at least one batch processing chamber with a buffer chamber and staging platform, and a transfer robot disposed in the transfer region wherein the transfer robot has at least one substrate transfer arm that comprises multiple substrate handling blades. The platform may include two batch processing chambers configured with a service aisle disposed therebetween to provide necessary service access to the transfer robot and the deposition stations. In another embodiment, the processing platform comprises at least one batch processing chamber, a substrate transfer robot that is adapted to transfer substrates between a FOUP and a processing cassette, and a cassette transfer region containing a cassette handler robot. The cassette handler robot may be a linear actuator or a rotary table.