The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 2010
Filed:
Sep. 11, 2008
Applicants:
Thoralf Kautzsch, Dresden, DE;
Boris Binder, Dresden, DE;
Dirk Meinhold, Dresden, DE;
Ben Rosam, Dresden, DE;
Bernd Foeste, Dresden, DE;
Andreas Thamm, Dresden, DE;
Inventors:
Thoralf Kautzsch, Dresden, DE;
Boris Binder, Dresden, DE;
Dirk Meinhold, Dresden, DE;
Ben Rosam, Dresden, DE;
Bernd Foeste, Dresden, DE;
Andreas Thamm, Dresden, DE;
Assignee:
Infineon Technologies AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 7/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A semiconductor device includes a first cavity within a semiconductor substrate and a second cavity within the semiconductor substrate. The second cavity is open to an atmosphere and defines a first lamella between the first cavity and the second cavity. The semiconductor device includes a first sense element configured for sensing a pressure on the first lamella.