The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 2010
Filed:
Jun. 17, 2005
James R. Engstrom, Ithaca, NY (US);
Aravind S. Killampalli, Beaverton, OR (US);
Paul F. MA, Santa Clara, CA (US);
James R. Engstrom, Ithaca, NY (US);
Aravind S. Killampalli, Beaverton, OR (US);
Paul F. Ma, Santa Clara, CA (US);
Cornell Research Foundation, Inc., Ithaca, NY (US);
Abstract
Systems and methods for preparing inorganic-organic interfaces using organo-transition metal complexes and self-assembled monolayers as organic surfaces. In one embodiment, a silicon wafer is cleaned and reacted with stabilized pirhana etch to provide an oxide surface. The surface is reacted with the trichlorosilyl end of alkyltrichlorosilanes to prepare self assembling monomers (SAMs). The alkyltrichlorosilanes have the general formula R1-R—SiCl, where R1 is —OH, —NH, —COOH, —SH, COOCH, —CN, and R is a conjugated hydrocarbon, such as (CH2)where n is in the range of 3 to 18. The functionalized end of the SAM can optionally modified chemically as appropriate, and is then reacted with metal-bearing species such as tetrakis(dimethylamido)titanium, Ti[N(CH)], (TDMAT) to provide a titanium nitride layer.