The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 2010
Filed:
May. 12, 2006
Michel Pharand, Chelmsford, MA (US);
Klaus Becker, Kensington, NH (US);
Klaus Petry, Merrimac, MA (US);
Marvin R. Lafontaine, Kingston, NH (US);
Michael R. Mitrano, Wilmington, MA (US);
Michel Pharand, Chelmsford, MA (US);
Klaus Becker, Kensington, NH (US);
Klaus Petry, Merrimac, MA (US);
Marvin R. LaFontaine, Kingston, NH (US);
Michael R. Mitrano, Wilmington, MA (US);
Axcellis Technologies, Inc., Beverly, MA (US);
Abstract
A combination load lock apparatus is provided, wherein a chamber is coupled to two or more valves in selective fluid communication with two or more respective volumes. A support member for supporting a workpiece is disposed within an interior portion of the chamber, wherein a translation apparatus is operably coupled thereto. The translation apparatus is operable to rotate and/or translate the workpiece on the support member about and/or along a first axis, wherein a detection apparatus associated with the chamber is operable to detect one or more characteristics of the workpiece during the rotation and/or translation thereof. The workpiece may be further rotated in a predetermined manner based on the one or more detected characteristics. A recess is further defined in the interior portion of the chamber, wherein the translation apparatus is operable to translate the workpiece into and out of the recess to reduce particulate contamination thereon.