The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 2010
Filed:
Sep. 06, 2007
Applicants:
Hisatoshi Otsuka, Joetsu, JP;
Kazuo Shirota, Joetsu, JP;
Osamu Sekizawa, Joetsu, JP;
Inventors:
Assignee:
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C03B 21/00 (2006.01); C03B 23/00 (2006.01); C03B 25/00 (2006.01); C03B 27/00 (2006.01); C03B 37/018 (2006.01); C03B 31/00 (2006.01); C03B 33/00 (2006.01); C03C 3/06 (2006.01);
U.S. Cl.
CPC ...
Abstract
A synthetic quartz glass substrate having (i) an OH concentration of 1-100 ppm and a hydrogen molecule concentration of 1×10-1×10molecules/cm, (ii) an in-plane variation of its internal transmission at wavelength 193.4 nm which is up to 0.2%, and (iii) an internal transmission of at least 99.6% at wavelength 193.4 nm is suited for use with excimer lasers.