The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 02, 2010
Filed:
Jun. 27, 2008
Applicant:
Slawomir Czerkas, Weilburg, DE;
Inventor:
Slawomir Czerkas, Weilburg, DE;
Assignee:
Vistec Semiconductor Systems GmbH, Weilburg, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/24 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for correcting the measured values of positions of structures () on a substrate () resulting from bending of a substrate () is disclosed. A plurality of geometric parameters of the substrate () are determined. A plurality of physical parameters of the substrate () are determined. A degree of bending is calculated individually for each substrate () on the basis of the obtained geometric parameters, the physical parameters and the position of the support points (). The measured position data of the structures () on the substrate () is corrected with the aid of each individually calculated degree of bending.