The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 02, 2010
Filed:
Oct. 21, 2008
Christopher K. Ober, Ithaca, NY (US);
Yi Yi, Urbana, IL (US);
Ramakrishnan Ayothi, San Jose, CA (US);
Christopher K. Ober, Ithaca, NY (US);
Yi Yi, Urbana, IL (US);
Ramakrishnan Ayothi, San Jose, CA (US);
Cornell Research Foundation, Inc., Ithaca, NY (US);
Abstract
The invention provides various ionic and non-ionic photoacid generator compounds. Photoresist compositions that include the novel ionic and non-ionic photoacid generator compounds are also provided. The invention further provides methods of making and using the photoacid generator compounds and photoresist compositions disclosed herein. The compounds and compositions are useful as photoactive components in chemically amplified resist compositions for various microfabrication applications.