The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 02, 2010
Filed:
Jan. 15, 2009
Joseph R. Monkowski, Danville, CA (US);
Jialing Chen, Sunnyvale, CA (US);
Tao Ding, Pleasanton, CA (US);
James Macallen Chalmers, Danville, CA (US);
Joseph R. Monkowski, Danville, CA (US);
Jialing Chen, Sunnyvale, CA (US);
Tao Ding, Pleasanton, CA (US);
James MacAllen Chalmers, Danville, CA (US);
Pivotal Systems Corporation, Pleasanton, CA (US);
Abstract
Methods and apparatus utilize a rate of drop in pressure upstream of a gas flow controller (GFC) to accurately measure a rate of flow through the GFC. Measurement of the gas flow through the many gas flow controllers in production use today is enabled, without requiring any special or sophisticated pressure regulators or other special components. Various provisions ensure that none of the changes in pressure that occur during or after the measurement perturb the constant flow of gas through the GFC under test.