The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 26, 2010
Filed:
Apr. 25, 2006
Andrew Leonard Goodyear, Clevedon, GB;
Philip Douglas Rossbrook, Clevedon, GB;
Andrew Leonard Goodyear, Clevedon, GB;
Philip Douglas Rossbrook, Clevedon, GB;
Oxford Instruments Plasma Technology Limited, Abingdon, GB;
Abstract
A method is provided of generating and using a control program for a obtain plasma process. The method comprises obtaining predetermined process data defining, in a series of time steps, changes in at least one control parameter for the plasma process during the said process. Control data are generated from the process data, the control data defining the at least one control parameter at a plurality of discrete times within each step. The control data are presented graphically to a user, using an interactive display device. The control data are modified in response to the operation by the user of the interactive display device, so as to generate the control program.